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主要参考文献：
1、 C.C. Yang, et al., Fabrication of a vertical reflow microlens with silylation technology, Sensors and Actuators A, Vol. 136, 2007, pp. 398–402;
2、 H. Yang, et al., High fill-factor microlens array mold insert fabrication using a thermal reflow process, J. Micromech. Microeng., Vol. 14 (8), 2004, pp. 1197–1204;
3、 Che-Ping Lin, et. al., Hexagonal microlens array modeling and fabrication using a thermal reflow process, J. Micromech. Microeng., Vol.13 (5), 2003, pp. 775–781;
4、 Feidhlim T. O’Neill, et al., Photoresist reflow method of microlens production, Part I: Background and experiments, Optik, Vol. 113(9), 2002, pp.391–404.
5、 Hsiharng Yang, et al.,, Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers, J. Micromech. Microeng., Vol. 14 (2), 2004, pp.277-282
Jae-Won Lee, et al., Modeling thermal reflow of resist contact hole arrays, Proc. SPIE, Vol. 5256, 2003

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